Fast aerial image model for EUV lithography using the adjoint fully convolutional network.

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Abstract

The effects of thick-mask and oblique incidence in extreme ultraviolet (EUV) lithography system make the aerial image calculation a challenging task. This paper develops a fast EUV lithography aerial image model based on a new kind of deep learning framework called adjoint fully convolutional network (AFCN). The AFCN consists of two adjoint data paths to respectively recover the real part and imaginary part of the complex mask diffraction-near-field (DNF). The feature-swapping technique is introduced to exchange the information between the real and imaginary data paths. The AFCN is trained based on a pre-calculated rigorous thick-mask DNF dataset. Given the estimated thick-mask DNF, the Abbe’s method is used to calculate the aerial image of the partially coherent lithography system. Compared to the traditional non-parametric kernel regression method, the proposed model reduces the error by more than 80% and achieves 25-fold improvement in computational efficiency.